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Y=e−DSY = e^{-D S}

Why this formula appears here

with D the defect density, S the die area, and c a cluster parameter [ 16 ] . As c →\to ∞\infty the expression tends to the Poisson model Y = e−DSe^{-D S} , which assumes defects fall independently and uniformly.

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e−DSe^{-D S}

Symbol e^-D S

e−e^-D S is one of the signed contributions combined to compute the quantity on the left.

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Published contexts (1)

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Y=e−DSY = e^{-D S}

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Patterning at the Limit: What Actually Happens When a Chip Is Manufactured

This equation states an equality: the expressions on both sides have the same value under the article’s assumptions.

with D the defect density, S the die area, and c a cluster parameter [ 16 ] . As c →\to ∞\infty the expression tends to the Poisson model Y = e−DSe^{-D S} , which assumes defects fall independently and uniformly.

Equation guide → · Article →