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Equation 20 · Part 2 · Patterning at the Limit: What Actually Happens When a Chip Is Manufactured

Symbol e^-D S

Y=e−DSY = e^{-D S}
e−DSe^{-D S}

What this part means

e−e^-D S is one of the signed contributions combined to compute the quantity on the left.

Its job in the formula

e−e^-D S is one of the signed contributions combined to compute the quantity on the left.

The passage around this formula

with D the defect density, S the die area, and c a cluster parameter [ 16 ] . As c →\to ∞\infty the expression tends to the Poisson model Y = e−DSe^{-D S} , which assumes defects fall independently and uniformly.

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Learn the underlying idea

An exponent tells how a base is used in multiplication. In x³, x is the base and 3 is the exponent: x³ = x × x × x.

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Sources cited in the surrounding passage

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