Symbol in context

$\sigma_{\mathrm{LER}}^{2}$

This entry links every published equation using this exact notation. Its meaning may change between equations.

Used in 1 equation

\mathrm{EPE} = \sqrt{\sigma_{\mathrm{overlay}}^{2} + \sigma_{\mathrm{CD}}^{2} + \sigma_{\mathrm{LER}}^{2}},

Patterning at the Limit: What Actually Happens When a Chip Is Manufactured · Equation 14

This equation states an equality: the expressions on both sides have the same value under the article’s assumptions.

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