Symbol m
m is a part of this expression. Its role is fixed by the surrounding article and by the operations shown in the formula.
Read this term in its guide →Published equation contexts
Why this formula appears here
A single reflective surface will not do it. The mirrors used in EUV systems are not a polished metal surface but a stack of dozens of alternating molybdenum and silicon layers, each only a few atomic layers thick, engineered so that the many weak partial reflections at each interface add together in phase. A close analogue to the classical Bragg condition for layered reflectors, . describes why the stack works at all: at near-normal incidence, is small and is close to one, so the first-order condition reduces to roughly 2d , meaning a bilayer period d of a little under 7 nanometers should reflect strongly somewhere near 13.5–14 nanometers.…
Read the representative guide
Symbol λ
λ is a part of this expression. Its role is fixed by the surrounding article and by the operations shown in the formula.
Read this term in its guide →Symbol θ
θ is a part of this expression. Its role is fixed by the surrounding article and by the operations shown in the formula.
Read this term in its guide →How to interpret it
Its accuracy depends on the assumptions and range of use described in the article.
Research cited beside this formula
Published contexts (1)
A symbol can carry a different meaning in another article. Each occurrence keeps its own guide and term definitions.
Equation 1 · Semiconductors
How Advanced Semiconductor Fabrication Actually Works
This equation gives an approximation: it relates the quantities while allowing an approximation.
A single reflective surface will not do it. The mirrors used in EUV systems are not a polished metal surface but a stack of dozens of alternating molybdenum and silicon layers, each only a few atomic layers thick, engineered so that the many weak partial reflections at each interface add together in phase. A close analogue to the classical Bragg condition for layered reflectors, . describes why the stack works at all: at near-normal incidence, is small and is close to one, so the first-order condition reduces to roughly 2d , meaning a bilayer period d of a little under 7 nanometers should reflect strongly somewhere near 13.5–14 nanometers.…