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Equation 9 · Part 7 · Patterning at the Limit: What Actually Happens When a Chip Is Manufactured

Denominator: NA^2

DOF=k2λNA2.\mathrm{DOF} = k_2 \frac{\lambda}{\mathrm{NA}^2}.
NA2\mathrm{NA}^2

What this part means

The complete quantity below the fraction bar; it must be nonzero for this division.

Its job in the formula

NA2A^2 occurs below the fraction bar. The quantity above the bar is divided by this expression; zero is excluded as a denominator.

The passage around this formula

The relation that is usually left out of popular accounts is the one that costs money: DOF=k2λNA2\mathrm{DOF} = k_2 \frac{\lambda}{\mathrm{NA}^2}. Depth of focus falls with the square of numerical aperture. Resolution is bought linearly in NA\mathrm{NA} and paid for quadratically in focus budget. This is why the planarisation step exists at all, why resist films keep getting thinner, and why every increase in NA\mathrm{NA} makes the mechanical and material problems worse rather than better. The roadmap is explicit that meeting small depths of focus at 0.55 numerical aperture is a key challenge in its own right, and that a longer-term move to still higher aperture would drive resist thicknesses below 20 nm [ 1 ] .

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Learn the underlying idea

A fraction a/b means a divided by b. The top number is the numerator; the bottom number is the denominator, and it cannot be zero.

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Sources cited in the surrounding passage

These citations provide research context; check each source for the exact claim it supports.