Equation 17 · Patterning at the Limit: What Actually Happens When a Chip Is Manufactured
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the die area. Read the equation part by part below; each part has a contextual explanation and a link to its mathematical background.
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with D the defect density, S the die area, and c a cluster parameter [ 16 ] . As c the expression tends to the Poisson model Y = , which assumes defects fall independently and uniformly.
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