Equation 12 · Part 2 · Patterning at the Limit: What Actually Happens When a Chip Is Manufactured
subscript
subscript
What this part means
The lower label selects a particular version, component, or indexed member of the quantity. For example, x₀ and xₜ can be values at different positions.
Its job in the formula
A subscript distinguishes a version, component, step, or member of a quantity. It does not automatically mean multiplication.
Full expression→subscript→Article meaning
The passage around this formula
There are only three levers, and two of them are nearly exhausted. Wavelength went 436, 365, 248, 193 nm and then stopped. Numerical aperture rose past 1.0 only because immersion lithography put water between the final lens and the wafer, and the refractive index of water caps the useful aperture near 1.35 — a figure ASML calls the highest in the industry for its current 193 nm immersion platform, quoting production resolutions down to 40 nm with quadrupole illumination and 38 nm with dipole [ 8 ] . Substitute the vendor’s own numbers back into the relation and the implied is about 0.27, within a few per cent of the two-beam floor. There is nothing meaningful left to extract from that…
Learn the underlying idea
A subscript is a label attached below a symbol. It often selects a time step, component, category, or member of a sequence.
Open the illustrated subscripts: which member of a family? guide →
Sources cited in the surrounding passage
These citations provide research context; check each source for the exact claim it supports.