Equation 13 · How Advanced Semiconductor Fabrication Actually Works
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Symbol mu
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comparing the distance from the process mean to its nearer specification limit against three standard deviations of the process’s own spread. A at or above about 1.33 is generally treated as acceptable capability, 1.67 or above as excellent, and below 1.0 as a process that cannot reliably meet its own specification even when perfectly centered [ 10 ] . The index does one specific job: it converts “how tight is this distribution” and “how close is it to the edge of what’s allowed” into one comparable number across hundreds of different measured parameters in the same fab.
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