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Equation 3 · Part 3 · Comparing the Main Approaches to Advanced Semiconductor Fabrication

Symbol N

σN=σN.\sigma_N = \sigma\sqrt{N}.
NN

What this part means

N is part of the quantity the equation computes from the expression on the right.

Its job in the formula

N is part of the quantity the equation computes from the expression on the right.

The passage around this formula

…schemes another etch and clean, and another round of the metrology that has to confirm the result before the next layer can be trusted to sit on top of it. If a critical layer’s target pitch is split across N separately printable exposures — as litho-etch-litho-etch and self-aligned multiple patterning both do, in different ways — and each exposure contributes an independent, zero-mean placement error of standard deviation σ\sigma , the layer’s overlay-driven placement uncertainty combines in…

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A variable is a named place for a value. Its letter is a local label: x can mean position in one formula and a data point in another.

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