Equation 3 · Part 2 · Comparing the Main Approaches to Advanced Semiconductor Fabrication
Symbol σ
What this part means
σ is part of the quantity the equation computes from the expression on the right.
Its job in the formula
σ is part of the quantity the equation computes from the expression on the right.
Full expression→Symbol σ→Article meaning
The passage around this formula
…N separately printable exposures — as litho-etch-litho-etch and self-aligned multiple patterning both do, in different ways — and each exposure contributes an independent, zero-mean placement error of standard deviation , the layer’s overlay-driven placement uncertainty combines in quadrature: . Treat this as a simplified budgeting device rather than a physical law; real exposures on the same scanner and same reticle stage are not fully independent, and correlated error can be partly…
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A variable is a named place for a value. Its letter is a local label: x can mean position in one formula and a data point in another.
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Sources cited in the surrounding passage
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