#copper interconnect

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A tall glass-fronted archive cabinet holding five dated fabrication specimens on chronological shelves, with a reticle pod riding a wheeled cart partway toward its own empty top shelf, not yet racked

From Origins to Frontier: A History of Advanced Semiconductor Fabrication

Six dated, sourced transitions: the 1959 planar process, Moore's 1965 observation, the 1997 shift to copper, immersion lithography's 2004 rescue of the DUV scanner, and EUV's three-decade path to production.

By Brecht Corbeel · October 2, 2026 · 15 min read

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